Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for Pirani gauges1 Scope This document identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. This document applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa. This document complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards. In addition, this document defines procedures to

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